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TONiC™ UHV Incremental Encoder System
ID：TONiC UHV
TONiC UHV encoder offers all the benefits of the established TONiC linear and rotary encoder systems, in a readhead that has been designed and constructed using ultra-high vacuum compatible materials and processes.
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- Clean RGA
- Low outgassing rates
- High bake-out temperature of 120 °C
- Low power consumption readheads
- Non-contact open optical system
- Detachable analogue or digital connector with integral interpolation to 1 nm resolution (0.00075 arc seconds)
- Resolution to 1 nm
- Dynamic signal processing provides ultra-low SDE of typically ±30 nm
- Auto Gain Control (AGC) ensures constant signal strength for long‑term reliability
- Compatible with a wide range of linear and rotary scales with customer selectable IN-TRAC auto-phase optical reference mark (datum)
